ASML is contemplating price increases for its Low-NA EUV tools, a move that has reportedly displeased customers, including TSMC. ASML CFO Roger Dassen indicated that pricing adjustments will align with enhanced tool value and productivity gains, largely driven by software improvements.

This value-based pricing strategy means that machines like the TWINSCAN NXE:3800 E (for 2 nm nodes), TWINSCAN NXE:3600 D (for 3/5 nm), and TWINSCAN NXE:3400 C (for 5/7 nm) will likely become more expensive. While current orders are fixed, price adjustments for Low-NA EUV scanners are expected to commence in 2028.

TSMC is reportedly unhappy with this development and has voiced its concerns to ASML. However, due to ASML's unique position as the sole provider of such advanced EUV scanners, TSMC is likely to accept the price changes.